Hi, here I have a question about writing XR-1541 on gold surface on
silicon substrate. I did two exposure, one with diluted XR (~40nm
spinning on silicon) and one with norm one (~120nm spinning on silicon).
Unfortunately for both cases the writing were not successful. Some weird
line-like defects occurred and I could hardly find my pattern. I am
wondering whether there's any adhesion problem or something else. I know
PMMA works fine on Silver surface, but have no experience with XR-1541.
Would you have any suggestion about this?
Thanks a lot,
Long