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MEMSnet Home: MEMS-Talk: How to analyse surface conditions?
How to analyse surface conditions?
2006-04-27
Wullinger, Michaela
2006-05-01
Kirt Williams
How to analyse surface conditions?
Wullinger, Michaela
2006-04-27
Hi
I'm looking appropriate methods to analyse the surface conditions during
processing  of masks.
What I need to know: contaminations? Surface bonds? H2O content?

Which methods can you suggest?

Regards
Michaela


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