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MEMSnet Home: MEMS-Talk: how to reduce miscut angle
how to reduce miscut angle
2006-04-27
Andrea Mazzolari
2006-04-28
Duan
2006-04-28
Kenneth Smith
how to reduce miscut angle
Andrea Mazzolari
2006-04-27
I have (110) silicon waferds with a miscut angle of 0.1°. Is there a way to
reduce miscut angle? Can an etching in TMAH help?

Thanks
Andrea

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