Try polyimide - it etches off with O2 plasma. HD Microsystems and Dupont
both make a variety of flavors.



Steve Solomon
Acumen Scientific
VOX: 805.708.5084
FAX: 805.683.2464
http://www.acumenscientific.com/

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of J.J wang
Sent: Wednesday, April 19, 2006 10:25 PM
To: [email protected]
Subject: [mems-talk] Any Good Sacrificial Layers ?

Dear All,
I am trying to deposit a suspended metal layer over a sacrificial layer. Is
any material that can be used as a sacrifical layer that:
1) Can be removed without using ultrasonic bath. The ultrasonic bath seem to
liftoff my metal structure as well.
2) Can be removed without RIE etching. The RIE etching has to be isotropic
in order to etch out the underneath sacrificial layer. Our nanofacility
doesn't have a very good etcher.

I tried NR7, but it is pretty sticky, without utlrasonic, it is very hard to
remove completely. Can I use SU-8 ?

Any help and suggestion will be highly appreciated.