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MEMSnet Home: MEMS-Talk: Pyrex etching
Pyrex etching
2006-05-08
Terry Zhu
2006-05-09
ravi deverkadra
2006-05-09
Marco Doms
2006-05-19
Ha-Duong Ngo
Pyrex etching
Terry Zhu
2006-05-08
Hi All,

I want to etch Pyrex for up to 70 microns to make some structures.
Anyone has experiences and can tell me what the enchant and the masking
materials(films) are the suitable one? Is it possible to get some sort
of anistropic etching? Thanks.

Terry

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