Gareth,
out of interest, what sort of etch rates do you get for sodalime glass with
that etchant?
thanks,
Paul
-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of Gareth Jenkins
Sent: 09 May 2006 14:17
To: General MEMS discussion
Subject: Re: [mems-talk] Ammonium fluoride
Rupesh Sawant wrote:
> Hi,
> I want to make NH4F (Ammonium fluoride) in my lab for etching
> glass. The concentration of Ammonium Fluoride required is 40%.
I assume this is to buffer a solution containing HF.
Are you talking about semiconductor grade? Standard (non-semiconductor
grade) is fine for microfluidics and isn't expensive.
You could also consider using an aqueous solution with 2% conc. HF + 2%
conc. HNO3 instead. This gives very nice results for soda-lime glass.
Gareth