Terry,
PECVD silicon carbide at about 5kA will work in any wet etch.
Best Regards,
Glenn

-----Original Message-----
From: Terry Zhu [mailto:[email protected]]
Sent: Tuesday, May 09, 2006 10:20 AM
To: [email protected]
Subject: [mems-talk] Masking layer for pyrex etching


Hi,

  Thanks, Ravi and Gareth. I guess the electroplating is needed for 15um
nickel. It is very thick layer.  Do you think sputtering a thin  layer of
gold/Cr good for masking layer or other capable thin films?

  Regards,

  Terry