Hi All,
     I'm trying to select a platinum group metal (Pt, Pd, Rh, Ir, Os, Ru,
etc.) for use in my device.  I was wondering if anyone had any information
on the etch resistance of these materials to various etches.  In particular,
I'd like to know if they can withstand hot phosphoric acid, HF, BOE, and SF6
RIE.  Any help or pointers to references would be greatly appreciated.

Best,
Lou