"The Handbook Of Metal Etchants" by Walker and Tarn, is an excellent place
to start.  It's a very thorough review of metal etchants.

The ISBN is 0849336236

http://www.worldcatlibraries.org/wcpa/top3mset/5e4b891fe5f5578ba19afeb4da09e
526.html

David Nemeth
Senior Engineer
Sophia Wireless, Inc.


-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of Lou Chomas
Sent: Thursday, May 11, 2006 8:39 PM
To: [email protected]
Subject: [mems-talk] Platinum Group Metals


Hi All,
     I'm trying to select a platinum group metal (Pt, Pd, Rh, Ir, Os, Ru,
etc.) for use in my device.  I was wondering if anyone had any information
on the etch resistance of these materials to various etches.  In particular,
I'd like to know if they can withstand hot phosphoric acid, HF, BOE, and SF6
RIE.  Any help or pointers to references would be greatly appreciated.

Best,
Lou