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MEMSnet Home: MEMS-Talk: Query regarding ability of Aluminum to reduce native SiO2
Query regarding ability of Aluminum to reduce native SiO2
2006-05-22
polly
Query regarding ability of Aluminum to reduce native SiO2
polly
2006-05-22
Dear Sir
I would to enquire if aluminum deposited on native oxide would give an ohmic
contact after post metalization anneal cycle at 450C. as theoretically aluminum
can reduce the native oxide to make contact with silicon.

pourus
reply
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