Either a long range contact profilometer (like Tencor P1) or a thin film
stress measuring system (like Tencor FLX-2320) can do this job.

Good luck,

Hongjun

------------------------------------
Hongjun Zeng, PhD
MEMS/Nano Scientist
Nanotechnology Core Facility
(NCF formerly MAL)
University of Illinois at Chicago
3064 ERF Building
842 W. Taylor St., Chicago, IL 60607
Tel. 312-355-1259, Fax: 312-413-0447
------------------------------------

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of deepa sree
Sent: Wednesday, June 07, 2006 6:10 AM
To: [email protected]
Subject: [mems-talk] Wafer Bow measurement

Can anyone tell me how to measure the bow of a wafer?