If you just want to get a single point measurement, flip the wafer over
and measure with micrometer at the center of the wafer without pressing
down. Measure the thickness of the wafer front side up with the same
micrometer but press down hard to flatten the area around the
measurement (the crude way of doing this is pressing with two fingers on
both sides of the micrometer tip)

Elina

-----Original Message-----
From: deepa sree [mailto:[email protected]]
Sent: Wednesday, June 07, 2006 6:10 AM
To: [email protected]
Subject: [mems-talk] Wafer Bow measurement

Can anyone tell me how to measure the bow of a wafer?