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MEMSnet Home: MEMS-Talk: Re: Cu Plating Vias
Re: Cu Plating Vias
2006-06-07
Isibhakhomen Umolu Abhulimen
2006-06-08
PRAMOD GUPTA
Re: Cu Plating Vias
Isibhakhomen Umolu Abhulimen
2006-06-07
Sorry All,

It was a mistake, I meant PVD not PECVD. I have tried sputtering over 1.5um on
the top surface but still no Cu seed layer at the bottom of the via.

Isi



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