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MEMSnet Home: MEMS-Talk: additive package for copper superfilling
additive package for copper superfilling
2006-06-12
xiaodong wang
additive package for copper superfilling
xiaodong wang
2006-06-12
Hi, all,

I am looking for a commercialized additive package for
copper superfilling (110 nm via with 2.8 um deep).

Any information about it?

Thank you.
reply
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