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MEMSnet Home: MEMS-Talk: porous sidewall of SU8
porous sidewall of SU8
2006-06-13
[email protected]
2006-06-13
Gareth Jenkins
problem with sidewall of SU8
2006-06-14
supriadi sugeng
porous sidewall of SU8
[email protected]
2006-06-13
Hello all,

Recently I have been working on the SU8 50 and SU8 2050.
I noticed that the sidewalls exhibit porous-like texture.
The SU8 50 was expired a year ago but the SU8 2050 is fresh.
I am wondering is there anyone notice about this?
Is it the nature of SU8 or some process steps I can do to eliminate this
problem?
Thanks,


Jason
reply
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