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MEMSnet Home: MEMS-Talk: wait time for AZ P4620 for a glass substrate
wait time for AZ P4620 for a glass substrate
2006-06-17
Rupesh Sawant
2006-06-19
Jaephil Do
2006-06-19
Brubaker Chad
wait time for AZ P4620 for a glass substrate
Rupesh Sawant
2006-06-17
I am using AZ P4620 photoresist to make a masking layer on a soda lime
glass. Is it necessary to have a wait time between the soft bake and
exposure process and also after exposure? the specification sheet tell
to keep a wait time between the processes which i have mentioned. But
that specification sheet is for silicon as a substrate. Do i need to
keep wait time if i am using glass as a substrate and if yes then why?

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RUPESH SAWANT
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