Dear Pradeep Sharma,

I'm curious about the application and need for surface roughness of Tungsten
electopolish.  Can you let me know the reason for the RMS requirement of a few
nanometers?

Thank you.

Best regards,

Thomas Bristow
Chapman Instruments


-----Original Message-----
From: [email protected] [mailto:[email protected]] On
Behalf Of pradeep # sharma
Sent: Sunday, June 18, 2006 10:29 PM
To: [email protected]
Subject: [mems-talk] Method to Electropolish Tungsten

Dear Friends,
Can any one describe in detail/give link about the method to electropolish
Tungsten foil metal to get surface RMS roughness of the order of few nanometers.

I am looking for the following information:
1.. Type of electrolyte for Tungesten electropolish and its concentration?
2. Current Density used to electropolish?
3. Duration of electropolishing?

Friends, you may give reference about some electrochemistry group..

Thanks.

Pradeep Sharma.