1/2 mm is in the realm of diamond drill bit size. If you need to make just
a few vias and your positioning is in the realm of millimeters, then you
can do it yourself with a diamond bit, a drill press and a box that will
hold your wafer, and some water to keep it wet. You may be able to get an
optical machine shop to do it for a reasonable price.

I guess it depends on how many holes you need to make, how accurate their
size needs to be, and how accurately they need to be positioned.

Jesse Fowler




"Mohammed El-Tanani"  wrote:
Subject Re: [mems-talk] Via hole on glass/Quartz


Dear Shay and All;

Thanks a lot for the benifitial answer and companies link. I want to make
a
via which is <=0.5mm, so do you have any further sugeestion?

Thanks a bunch

Mohammed