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MEMSnet Home: MEMS-Talk: About remove UVN30.
About remove UVN30.
2006-06-22
Xiaojing Zou
About remove UVN30.
Xiaojing Zou
2006-06-22
Hi:

     Recently, I am using UVN30 as mask to do dry etching. But I found out that
UVN30 is very hard to be removed with microposit remover 1165.  Can anyone give
me some advice??

Thanks a lot.


Best Regards

Xiaojing Zou
reply
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