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MEMSnet Home: MEMS-Talk: Surface charge on substrate
Surface charge on substrate
2006-06-22
Paul Chiarot
Surface charge on substrate
Paul Chiarot
2006-06-22
Hello everyone -

It is my understanding that a surface charge forms on a substrate after
specific processes.  For example, etching soda lime glass using BOE 6:1 or
10:1.  Is this true?  More importantly - if a surface charge does form - do
the high temperatures used in thermal bonding affect it?  Your experience
and any references are greatly appreciated.

Regards.
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