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MEMSnet Home: MEMS-Talk: Pt etchant
Pt etchant
2006-06-22
Jeehwan Kim
2006-06-22
Kirt Williams
2006-06-22
Michael D Martin
Pt etchant
Jeehwan Kim
2006-06-22
Dear colleagues,

I will use the Pt to protect my Si wafer surface for anodization. Is there
any one who has a recipe for removing Pt without attacking Si surface?

Please let me know. I really appreciate that in advance.

J. Kim
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