A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Pt etchant
Pt etchant
2006-06-22
Jeehwan Kim
2006-06-22
Kirt Williams
2006-06-22
Michael D Martin
Pt etchant
Michael D Martin
2006-06-22
Use aqua regia: 3 HCl: 1 HNO3 at ~80C. You might first try this at room
temperature.

-Mike Martin
  U. of Louisville

>>> [email protected] 06/22/06 4:51 PM >>>
Dear colleagues,

I will use the Pt to protect my Si wafer surface for anodization. Is
there
any one who has a recipe for removing Pt without attacking Si surface?
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
The Branford Group
Addison Engineering
MEMS Technology Review
MEMStaff Inc.