The effect of surface roughness on diffusion profiles
Roger Brennan
2006-06-23
Most semiconductor books solve Fick’s equation for a flat, semi-infinite
plane but what do you do to account for surface roughness. Sure, very deep
diffusions smooth out but how do you treat cases where the surface is
roughness compares or is less than the junction depth? Any help will be
greatly appreciated
Roger Brennan
Solecon Labs
Reno, NV 89521-5926
775-853-5900 ext 108