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MEMSnet Home: MEMS-Talk: DRIE - Heating Effects & influence on CMOS
DRIE - Heating Effects & influence on CMOS
2006-06-23
Micro Sense
2006-06-23
Michael D Martin
2006-06-26
Martin J Prest
2006-06-28
Micro Sense
DRIE - Heating Effects & influence on CMOS
Micro Sense
2006-06-23
Hello,

Is heating of free-standing structure/entire wafer for instance an issue in
DRIE, especially as a post-processing step ? How does DRIE post-processing
influence CMOS? I would appreciate if someone can recommend me some
interesting publication(s) concerning the above.

Many thanks.
reply
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