See Chapter 16.3, "Silicon Preferential (defect deliniation) etch rates" in
the book Crystalline Silicon, edited by Robert Hull, 1999.
    --Kirt Williams

----- Original Message -----
From: "Andrea Mazzolari" 
To: 
Sent: Monday, June 26, 2006 2:12 AM
Subject: [mems-talk] Silicon and germanium defect delineation


> Hi all.
> When dicing a silicon wafer, near the diced surface are produced defects
> and, i think, silicon become amorphous. Thickness of damaged layer is
> function of blade grit and dicing speed. Is there a way to delineate this
> type of defects?
> Could silicon defects delineation etches help? Can someone suggest me some
> articles about silicon defects delineation etches?
>
> For completely different tasks i'm interested also to germanium defects
> delineation etches. Could someone suggest me articles?