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MEMSnet Home: MEMS-Talk: DRIE - Heating Effects & influence on CMOS
DRIE - Heating Effects & influence on CMOS
2006-06-23
Micro Sense
2006-06-23
Michael D Martin
2006-06-26
Martin J Prest
2006-06-28
Micro Sense
DRIE - Heating Effects & influence on CMOS
Micro Sense
2006-06-28
>
> Mike and Martin, thanks for your inputs. Martin, yes I also experienced
> the same problems you'd mentioned. Passivating a bit longer should help in
> minimizing over-etching/notching.


- VJ
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