A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: DC Sputtering of Chromium and Platinum
DC Sputtering of Chromium and Platinum
2006-07-04
Rupesh Sawant
DC Sputtering of Chromium and Platinum
Rupesh Sawant
2006-07-04
I want to do DC sputtering of Chromium (as an adhesive layer) and
platinum (as an electrode layer on soda lime glass. Do i need to do
any surface treatment of glass apart from cleaning? Can someone tell
me the deposition rate of platinum if argon gas is used in sputtering
and what is the pressure of Argon required for that.

it would be very helpful if someone suggest me a reference paper for
DC sputtering of metal on glass.
--
RUPESH SAWANT
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Process Variations in Microsystems Manufacturing
Mentor Graphics Corporation
The Branford Group
University Wafer