Here is one that I used for crystalline germanium:

R. Leancu, N. Moldovan, L. Csepregi, and W. Lang, "Anisotropic etching of
germanium," Sensors and Actuators A, vols. 46-47, pp. 35-37, 1995.

I am pretty sure that these same authors also published another paper on
the topic in another journal but I cannot find it at this time.

Good Luck

Nels



At 01:00 PM 7/6/2006, you wrote:
>Hi all. I'm looking for infomations about wet etch of germanium.
>Until now i've found only this
>
>http://www-bsac.eecs.berkeley.edu/archive/john_heck_phd.pdf
>
>Can someone give me other references ?
>