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MEMSnet Home: MEMS-Talk: Etch through Si wafer with TMAH
Etch through Si wafer with TMAH
2006-07-08
Andrea Mazzolari
2006-07-10
Kasman, Elina
2006-07-10
[email protected]
Etch through Si wafer with TMAH
Andrea Mazzolari
2006-07-08
Hi all. I need to etch through a (110) silicon wafer 500um thick. I'm
planning to use TMAH. Will walls be perfectly vertical ? If not, which
etchant could i use ? In case of tmah etch will under etch responsible for
not vertical walls ?
Based on what i know, walls will not be perfectly vertical, this sould be
due to under etch... i'm i wrong ?
Could someone suggest me some article on this argument ?

Thanks!
Andrea

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