Sreemanth,
   You will want to use the lowest pressure possible (during the
deposition) and heat the substrate as high as you can.  You might also
consider performing an ion assisted deposition.

-Mike
 U. of Louisville

>>> "Sreemanth M Uppuluri"  07/16/06 9:08 PM >>>
Hello,

I am trying to obtain very low surface roughness films of Aluminum on
Quartz
substrates using e-beam evaporation. Please let me know if there are any

recipes specific to this issue such as speed of deposition, pressure and
so
on.

Thanks
Sreemanth