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MEMSnet Home: MEMS-Talk: MEMS Membrane Analytical Verification
MEMS Membrane Analytical Verification
2006-07-18
Dhorje, Mrugesh
Sputtering versus Evaporation for Aluminum Thin Films
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Sreemanth M Uppuluri
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Suraj Patil
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Loren St. Clair
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Raj Gupta
MEMS Membrane Analytical Verification
Loren St. Clair
2006-07-18
Two references come to mind

Roark's Formulas for Stress and Strain by Warren C. Young, Richard Budynas
Theory of Plates and Shells by Stephen Timoshenko

Loren.

 -----Original Message-----
From:   [email protected] [mailto:[email protected]]  On
Behalf Of Dhorje, Mrugesh
Sent:   Tuesday, July 18, 2006 12:42 PM
To:     [email protected]
Subject:        [mems-talk] MEMS Membrane Analytical Verification

Hello to All

I am Mrugesh Dhorje, doing my MS in Mechanical Engg. at Texas Tech University,
Lubbock, Texas.

I am trying to model a pressure sensor MEMS membrane (both circular and
Rectangular shape) in Ansys Educational version.

I would like to know if there is any analytical formulation relating the applied
pressure with the deflection so that I can compare whether the model is
converging or not.

Also can I know some reference to analytical calculation of stresses with
applied pressure once the membrane is deflected (in elastic and also in plastic
region)

Initially I searched memsnet for such solutions, but I found that the references
are pretty old and after that there have been many recent developments in the
theories.
reply
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