Dear Franck,

The shear modulus of polysilicon can be calculated with the measured values
of Young's modulus and Poisson's ration of polysilicon, i.e. G=E/{2(1+v)}.
>From my previous work in Professor Sharpe's group at the Johns Hopkins
University, the measured values of Young's modulus and Poisson's ration were
about 169 +/- 6 GPa and 0.22 +/- 0.01 respectively based on 48 samples.
Therefore, the shear modulus of polysilicon is calculated to be 69 GPa.

The above data and related testing techniques can be found at
http://titan.me.jhu.edu/~sharpe/ptt/ptt.html or in our recent
paper, "Measurement of Young's Modulus, Poisson's ratio, and Tensile
Strength of Polysilicon", by William N. Sharpe, Jr., Bin Yuan, Ranji
Vaidyanathan, and Richard L. Edwards, Published in the Proceedings of the
Tenth IEEE Annual International Workshop on Micro Electro Mechanical
Systems, Nagoya, Japan, January 26-30, 1997, pp.  42-429.

Good luck!

Bin Yuan, Ph.D.
Integrated Micromachines, Inc.
Burbank, CA 91505


-----Original Message-----
From: Franck CHOLLET 
To: [email protected] 
Date: Sunday, July 05, 1998 3:52 PM
Subject: Polysilicon rigidity modulus ?


>Hello,
>has anyone data on the modulus of rigidity (or shear modulus) of
>polysilicon?
>I'm designing a torsion system and it seems this data is not easily
>avalaible...
>Who will do the job for me... and post the result!
>
>Thank you.
>
> Franck Chollet, PhD          Tel: +65 874-8185
> Institute of Material Research and Engineering
>                  Optical MEMS
> Blk S7 Lvl 3  National University of Singapore
> Singapore 119260             FAX: +65 872-0785
> http://www.eng.nus.edu.sg/~mrefac/
>
>
>
>
>