Hello All,

does anyone use a Alcatel SCM450 Sputtering machine and has some
information about the stored program control (Siemens Siematic S5 100U)?
It seems, that our Eprom is erased. Did anyone a modification of this
control?

Has anyone cosputtered ZnO and ZnO:Al in such a machine to control the
doping concentration?

Thanks,

Oliver Horn