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MEMSnet Home: MEMS-Talk: SU 8 removal
SU 8 removal
2006-07-24
Jeff chen
2006-07-24
Joseph Grogan
2006-07-25
Sreemanth M Uppuluri
2006-07-25
Lujun Zhang
2006-07-24
J.J wang
2006-07-25
Brubaker Chad
2006-07-26
ZICKAR Michaƫl
2006-07-26
Zhiwei Zou
2006-07-26
Florian Herrault
SU 8 removal
Joseph Grogan
2006-07-24
Try Piranha cleaning (sulfuric acid + hydrogen peroxide), and remember
to be careful with the solution.

-Joe Grogan

Jeff chen wrote:
> Hi, all,
>
> Does anyone have some experience to completely remove SU8 after
> development?
> I tried PG Remover and it didn't work well. And also plasma cleaning
> under oxygen, still not working.
reply
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