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MEMSnet Home: MEMS-Talk: SU 8 removal
SU 8 removal
2006-07-24
Jeff chen
2006-07-24
Joseph Grogan
2006-07-25
Sreemanth M Uppuluri
2006-07-25
Lujun Zhang
2006-07-24
J.J wang
2006-07-25
Brubaker Chad
2006-07-26
ZICKAR Michaƫl
2006-07-26
Zhiwei Zou
2006-07-26
Florian Herrault
SU 8 removal
Sreemanth M Uppuluri
2006-07-25
>From my experience even solvent clean (acetone + methanol) in an ultrasonic
bath would do. I heard that piranha caused some problems in the past. So may
be you want to try solvents first and if it doesn't work then you may try
Piranha.

Regards,
Sreemanth


>From: Joseph Grogan 
>Reply-To: General MEMS discussion 
>To: General MEMS discussion 
>Subject: Re: [mems-talk] SU 8 removal
>Date: Mon, 24 Jul 2006 14:12:52 -0400
>
>Try Piranha cleaning (sulfuric acid + hydrogen peroxide), and remember to
>be careful with the solution.
>
reply
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