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MEMSnet Home: MEMS-Talk: SU 8 removal
SU 8 removal
2006-07-24
Jeff chen
2006-07-24
Joseph Grogan
2006-07-25
Sreemanth M Uppuluri
2006-07-25
Lujun Zhang
2006-07-24
J.J wang
2006-07-25
Brubaker Chad
2006-07-26
ZICKAR Michaƫl
2006-07-26
Zhiwei Zou
2006-07-26
Florian Herrault
SU 8 removal
Lujun Zhang
2006-07-25
Joseph Grogan wrote:

> Try Piranha cleaning (sulfuric acid + hydrogen peroxide), and remember
> to be careful with the solution.

You may try putting the wafer on spinner then drop some SU-8 developer
on the wafer and spin the wafer at very high speed usually I use
4000rpm/min.
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