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MEMSnet Home: MEMS-Talk: Oxidation of PDMS by plasma cleaning/etching
Oxidation of PDMS by plasma cleaning/etching
2006-07-28
Philip D. Hewes
2006-07-28
g.balsubra manian
2006-07-29
Gareth Jenkins
Oxidation of PDMS by plasma cleaning/etching
Philip D. Hewes
2006-07-28
Hello all,
My question is concerning PDMS oxidation by plasma cleaning and
subsequent conformational bonding, see Duffy et al (Anal. Chem.
(70)23:pg 4974). They used a Harrick PDC-23G (now PDC-32G), which I do
not have access to. Has anyone found wattage/pressure/flowrate settings
that can replicate the resulting bonding?

Philip D. Hewes

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