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MEMSnet Home: MEMS-Talk: Oxidation of PDMS by plasma cleaning/etching
Oxidation of PDMS by plasma cleaning/etching
2006-07-28
Philip D. Hewes
2006-07-28
g.balsubra manian
2006-07-29
Gareth Jenkins
Oxidation of PDMS by plasma cleaning/etching
g.balsubra manian
2006-07-28
Pls go through the paper.

Studies on surface wettability of poly(dimethyl)
siloxane (PDMS) and glass under oxygen-plasma
treatment and correlation with bond strength

Bhattacharya, S.   Datta, A.   Berg, J.M.
Gangopadhyay, S.
Dept. of Biol. Eng., Missouri Univ., Columbia, MO,
USA;

Microelectromechanical Systems, Journal

Cheers.
Bala.


--- "Philip D. Hewes"  wrote:

> Hello all,
> My question is concerning PDMS oxidation by plasma
> cleaning and
> subsequent conformational bonding, see Duffy et al
> (Anal. Chem.
> (70)23:pg 4974). They used a Harrick PDC-23G (now
> PDC-32G), which I do
> not have access to. Has anyone found
> wattage/pressure/flowrate settings
> that can replicate the resulting bonding?
>
> Philip D. Hewes
reply
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