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MEMSnet Home: MEMS-Talk: Pt on Si
Pt on Si
2006-07-31
Jeehwan Kim
2006-08-03
Oliver Horn
2006-08-03
Jeehwan Kim
2006-08-03
Michael D Martin
2006-08-04
Oliver Horn
Pt on Si
Jeehwan Kim
2006-07-31
Hi,

I will try to deposite 200nm Pt on Si wafers. Is it possible without
adhesion layer?

I succeed to deposite 50 nm Pt on Si before.

Please reply me if you have an idea.

Thank you in advance.

J. Kim

reply
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