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MEMSnet Home: MEMS-Talk: Carbon Sputtered Films
Carbon Sputtered Films
2006-08-01
Sreemanth M Uppuluri
2006-08-07
Kirt Williams
2006-08-01
Gary
Carbon Sputtered Films
Sreemanth M Uppuluri
2006-08-01
Hello All,

I have sputtered carbon films on my substrates and now I am trying to remove
them. I tried solvent clean but it doesn't seem to work very well. Do you
have suggestions?

Thanks,
Sreemanth


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