Sreemanth, My guess is that the carbon film you sputtered is amorphous and
adherent.  If the substrate will withstand a strong oxidation, plasma or
chemical (something like piranha) you could try that. Gary

Gary Hillman
Service Support Specialties, Inc.
9 Mars Court
PO Box 365
Montville, NJ 07045
973-263-0640
973-263-8888.



-----Original Message-----
From:   Sreemanth M Uppuluri [SMTP:[email protected]]
Sent:   Tuesday, August 01, 2006 8:50 AM
To:     [email protected]
Subject:        [mems-talk] Carbon Sputtered Films

Hello All,

I have sputtered carbon films on my substrates and now I am trying to
remove
them. I tried solvent clean but it doesn't seem to work very well. Do you
have suggestions?