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MEMSnet Home: MEMS-Talk: anisotropic etching of glass
anisotropic etching of glass
2006-08-01
Joe Grogan
2006-08-02
Brent Garber
anisotropic etching of glass
Joe Grogan
2006-08-01
Hi all,

I was wondering if anyone has experience with anisotropic RIE of glass.
I would like to form straight walled channels in microscope slides
(sodalime) or coverslips (zinc titania). I found some papers on the
topic but didn't have much success with their suggestions so I was
hoping to find someone with personal experience.

thanks in advance for any responses.

-Joe Grogan
reply
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