> Has anyone ever heard of this term. We are using it to describe a
>problem we are having along an exposed region of photoresist where the
>resist "pops" off leaving a semi-circle in the remaining pattern edge.
>We are using a 5 minute vapor prime but we have seen the same problem at
>lesser times so I dont think we are overpriming the wafers. You can
>immediatly tell after exposure if mousebites are there as they leave a
>bubbly area in some areas of the wafer which is visible to the eye
>before develop. This problem does not occur every time (15-20%). Any
>suggestions would be greatly appreciated.
>
>Please reply to [email protected]
>
>Regards, Pat Howell


I seems like you don't have good control of your resist thickness and/or
operating at the wrong thickness range where thickness change will affect
your expose dose most.

Regards,
Chia-Lun

___________________________________________________________________
Chia-Lun Tsai, PhD
School of Electrical Engineering
402 Phillips Hall      room 202     Phone: (607) 255-0012
Cornell University
Ithaca, NY 14853-5401       [email protected]