Hi,

You probably overexposed your resist. Reducing exposure time may help.

bye,

C. Marxer


Pat Howell wrote:

>  Has anyone ever heard of this term. We are using it to describe a
> problem we are having along an exposed region of photoresist where the
> resist "pops" off leaving a semi-circle in the remaining pattern edge.
> We are using a 5 minute vapor prime but we have seen the same problem at
> lesser times so I dont think we are overpriming the wafers. You can
> immediatly tell after exposure if mousebites are there as they leave a
> bubbly area in some areas of the wafer which is visible to the eye
> before develop. This problem does not occur every time (15-20%). Any
> suggestions would be greatly appreciated.
>
> Please reply to [email protected]
>
> Regards, Pat Howell
>