Jeehwan,
HF etches Ti.
-Michael Martin
>>> "Jeehwan Kim" 08/03/06 4:26 PM >>>
Hi Oliver,
I deposite 200nm Pt on Si with 50A Ti adhesion layer via e-beam
evaporator
and then put that into HF solution. Pt was removed (peeled off) after
several minute. Is that difference coming from machine we used?