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MEMSnet Home: MEMS-Talk: Pt on Si
Pt on Si
2006-07-31
Jeehwan Kim
2006-08-03
Oliver Horn
2006-08-03
Jeehwan Kim
2006-08-03
Michael D Martin
2006-08-04
Oliver Horn
Pt on Si
Michael D Martin
2006-08-03
Jeehwan,
   HF etches Ti.

-Michael Martin


>>> "Jeehwan Kim"  08/03/06 4:26 PM >>>
Hi Oliver,

I deposite 200nm Pt on Si with 50A Ti adhesion layer via e-beam
evaporator
and then put that into HF solution. Pt was removed (peeled off) after
several minute. Is that difference coming from machine we used?
reply
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