Agarwal:  Shiny like Al film? Evaporated Al film can also be very milky too if
you don't do it right. Just becacause the film appears milky doesn't mean it got
oxidized. There a a lot of reason to why the film is milky, the popular reason
is the grain size of the film. You can eliminate some of the
theories/uncertainties by slow down the evap rate and evap a thinner layer, say
1000A ......


  Message: 5
Date: Fri, 4 Aug 2006 09:57:54 -0400 (EDT)
From: [email protected]
Subject: [mems-talk] Indium evaporation
To: [email protected]
Message-ID:
<[email protected]>
Content-Type: text/plain;charset=iso-8859-1

Hello,
I am trying to e-beam evaporate .35 microns indium on silicon with Ti/Au
on it. I am getting milky looking film instead of a shiny, aluminum like
film.
I am using indium shots 99.9999% using a moly liner in a AJA system.
This oxide prohibits me to bond this In coated wafer to another Au coated
wafer.
Has anyone else encoutered the same issue with indium evap. How to get rid
of the oxide.