A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Indium evaporation
Indium evaporation
2006-08-04
[email protected]
2006-08-04
Shile
2006-08-04
B Frank
Indium evaporation
B Frank
2006-08-04
The In was oxided after it is taken out.
A feasible way is to add a thin Au layer upon the surface, since it
will bonded to another Au layer.. But make sure a small thickness.

On 8/4/06, [email protected]  wrote:
> Hello,
> I am trying to e-beam evaporate .35 microns indium on silicon with Ti/Au
> on it. I am getting milky looking film instead of a shiny, aluminum like
> film.
> I am using indium shots 99.9999% using a moly liner in a AJA system.
> This oxide prohibits me to bond this In coated wafer to another Au coated
> wafer.
> Has anyone else encoutered the same issue with indium evap. How to get rid
> of the oxide.
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Mentor Graphics Corporation
MEMS Technology Review
Harrick Plasma, Inc.
Process Variations in Microsystems Manufacturing