The In was oxided after it is taken out.
A feasible way is to add a thin Au layer upon the surface, since it
will bonded to another Au layer.. But make sure a small thickness.
On 8/4/06, [email protected] wrote:
> Hello,
> I am trying to e-beam evaporate .35 microns indium on silicon with Ti/Au
> on it. I am getting milky looking film instead of a shiny, aluminum like
> film.
> I am using indium shots 99.9999% using a moly liner in a AJA system.
> This oxide prohibits me to bond this In coated wafer to another Au coated
> wafer.
> Has anyone else encoutered the same issue with indium evap. How to get rid
> of the oxide.