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MEMSnet Home: MEMS-Talk: Re: recipe to reveal pn junction
recipe to reveal pn junction
2006-08-03
B Frank
Re: recipe to reveal pn junction
2006-08-04
B Frank
2006-08-05
Roger Brennan
Re: recipe to reveal pn junction
B Frank
2006-08-04
Hi, all
I am working on doping silicon wafer using boron diffusion.
But I don't know how to evaluate the doping depth.
I tried CP-4A(HNO3:HF:HAC=5:3:3) at room temperature to reveal the
interface between the p area and n area. The etching speed appears
very fast, seems not work.
Is there anyone has such experience?
Or how to reveal the interface?
Thank you.
reply
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