A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: clean the chips after DRIE
clean the chips after DRIE
2006-08-10
D. Zhou
2006-08-10
Florian Herrault
2006-08-10
Julie Verstraeten
2006-08-11
Michael D Martin
2006-08-10
Matthew Walker
2006-08-11
Manish Hooda
2006-08-11
chengzhengxi
clean the chips after DRIE
Florian Herrault
2006-08-10
You could try Piranha cleaning too.


Quoting "D. Zhou" :

> Dear all,
>
> I used S1813 as the mask for the DRIE of the top layer from the front-side.
> Then I put the chip upside down, attached it to an Oxide wafer and did
> another DRIE of the substrate from the back-side . After the etch, I found
> it difficult to remove the polymer formed during the etch. I dip my chips
> in Aceton for 10 mins and then used Oxygen plasmer to clean it. However,
> the top layer(device layer) of my chips were still not clean enough. Could
> anybody give me some suggestions on how to completely clean the chips after
> these two DRIE process? Thanks very much.
>

--
Florian Herrault, PhD student
Georgia Institute of Technology
791 Atlantic Dr., Atlanta, GA  30332-0269
ph:  404-894-9909; fax:  404-894-5028
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Nano-Master, Inc.
Process Variations in Microsystems Manufacturing
Mentor Graphics Corporation
The Branford Group