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MEMSnet Home: MEMS-Talk: Developing S8 channels through reservoir ports
silicon nitridation poser
2006-07-24
K Saw
2006-07-24
Glenn Silveira
2006-08-05
VS Bhat
2006-07-24
Isaac Chan
2006-08-09
K Saw
2006-08-10
VS Bhat
sample holders
2006-08-12
li cai
2006-08-14
jeff besterman
Developing S8 channels through reservoir ports
2006-08-15
prabhu arumugam
2006-08-15
Joseph Grogan
Developing S8 channels through reservoir ports
prabhu arumugam
2006-08-15
Dear SU 8 experts,

I am trying to develop a 20 micron high SU8 channel
(1.2 cm long) bonded between glass and silicon through
the fluidic ports at either end of the channel. I am
not able to develop the channel fully. I exposed for
20 s and developed in an ultrasonic bath.  Could
anyone share their experience/tricks/tips in solving
this.

Thanks for all the help.

Prabhu
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